Tufts Micro/Nano Fab:
Thin film deposition, photolithography, etching, packaging and
metrology for MEMS and NEMS. See the TMNF website for
Laboratory capabilities at the Vibrations and Acoustics Lab:
Measurement of sound and vibration. The lab has a good selection of
accelerometers and microphones, an electrodynamic shaker, impact
hammer, speakers, and data acquisition abilities.
The lab has a small anechoic chamber for acoustic measurements, a benchtop reverberation chamber, a velocity sled for Doppler measurement, and a conductive ink writing system.
We also have a nice microscale Laser Doppler Velocimetry system (LDV) for vibration
measurements with sub-angstrom resolution at frequencies from 10
Hz-20 MHz and spot size of less than 20 microns. The system is
capable of single point transient scans, two dimensional spatially
distributed steady state vibration scans, and two dimensional
spatially distributed transient scans.
The lab is also equipped with microscopes, micropositioners and
probes, and a variety of electrical test equipment. We can conduct
basic mechanical and electrical fabrication (test fixturing and PC
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